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Vacuum plasma cleaner 80L

Brand: Kimberlite

> Model: Vacuum plasma cleaner 80L

Cleaning effect: material surface cleaning, activation, etching, coating

Scope of application: Regardless of the processing object, it can process any material, such as metal, semiconductor, oxide or polymer materials, etc.

Enterprise advantage: non-standard customization can be made according to customer needs



Service Hotline:+86-0769-83002589
  • Product Description


- Working principle -

A series of physical and chemical changes are produced mainly through the action of plasma on the surface of the material. The active particles and high-energy rays contained in the plasma cleaning machine react and collide with organic pollutant molecules on the surface to form small molecular volatile substances, which move from the surface. In addition to achieve a cleaning effect.

(1) Physical reaction:

The main purpose is to use plasma particles as a purely physical impact to knock off the atoms on the surface of the material to remove the contaminants and etching effects on the surface of the material, roughen the surface of the material, and increase the surface ratio and wettability.

(2) Chemical reaction:

Use surface activation to generate new active groups on the surface of the material, and use this group to produce chemical covalent bonding with subsequent active materials. The subsequent active materials contain specific groups that can meet the application to meet the surface requirements. The characteristics can be firmly combined with the purpose.


- Product parameter -

Technical specificationsVP80
ElectrodeEffective size400(W)*410(D)mm
Electrode distribution6 layers horizontally distributed, the distance between the plates is 45mm
Vacuum chamberSize450(W)*400(D)*450(H)
MaterialAviation aluminum alloy
HostMain body size800(W)×1600(H)×800(D)mm
Installation area1500*1500mm
WeightStandard model: 500KG
RF power supplyPower@frequencyUS CERES-600W@13.56MHz or 1000W@40Khz
Vacuum pumpFrequency converterGermany Siemens inverter control vacuum pump motor
Mechanical oil pumpJapan ULAVC-60m3/h
Main accessoriesBarometerSevenStar 2 channel 0-300sccm
Vacuum detectorJapan ULAVC Pirani style
Vacuum breaking valveJapan CKD pneumatic valve
The electromagnetic valveJapan SMC vacuum solenoid valve
Way to controlSiemens PLC & Human Machine Interface
Installation conditionsElectricityAC380,50/60Hz,3Phase 5wire,5.2KVA
Compressed air0.4-0.6MPa
Process gasO2 N2 H2 Ar
Exhaust pipe connectionKF40


- Use -

Surface cleaning before wire bonding

Plasma cleaning before IC bonding

Activation and cleaning of ABS plastic

Cleaning before electroplating ceramic package

Surface modification and cleaning of other electronic materials


- Characteristic -

Use 13.56MHz RF power supply with automatic network matcher or IF 40Khz power supply

Product placement jigs are flexible and changeable, which can be adapted to products of different shapes

The product placement platform is flexible and easy to operate

Very small footprint


- Change of surface contact angle before and after plasma treatment -


- Dyne value changes before and after plasma treatment -



- Company Profile -
Guangdong Kimberlite Technology Co., Ltd.

Guangdong Kimberlite Technology Co., Ltd. is a high-tech enterprise with automation equipment as the leading, R & D, production and manufacturing.

It also has Shenzhen kimberlite Technology Co., Ltd., which is a high-tech enterprise specializing in plasma etching and cleaning system. Using plasma system R & D technology from Germany for 25 years, we provide plasma processing system for customers in high-tech electronic fields such as mobile phones, computers, circuit boards, led, semiconductor, photoelectric, solar energy, automobile, medical and other high-tech electronic fields and large-scale industrial fields.

The core members of the company's team have educational background related to automation equipment and application. Some of them have served for related well-known enterprises, and have many years of experience in automation equipment research and technology application.

Adhering to the "customer first, quality first, technological innovation, win-win cooperation" business philosophy, the company constantly introduces high-quality, high-standard, low-cost products, to provide real-time pre-sale, after-sales and technical integration of professional services for all customers.

Order:Vacuum plasma cleaner 80L
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