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Telephone(fax):+86-0769-83002589
Contacts:+86-13632530603
E-mail:christina.liu@sz-kimberlite.com
Headquarters:4th Floor, Building D, Shajing Street, Baoan District, Shenzhen
Production base:Room 303, Building 2, Dongmao Zhizhi Park, Chashan Jinshan Road, Chashan Town, Dongguan City, Guangdong Province
> Brand: Kimberlite
> Model: Vacuum plasma cleaner 80L
> Cleaning effect: material surface cleaning, activation, etching, coating
> Scope of application: Regardless of the processing object, it can process any material, such as metal, semiconductor, oxide or polymer materials, etc.
> Enterprise advantage: non-standard customization can be made according to customer needs
- Working principle -
A series of physical and chemical changes are produced mainly through the action of plasma on the surface of the material. The active particles and high-energy rays contained in the plasma cleaning machine react and collide with organic pollutant molecules on the surface to form small molecular volatile substances, which move from the surface. In addition to achieve a cleaning effect.
(1) Physical reaction:
The main purpose is to use plasma particles as a purely physical impact to knock off the atoms on the surface of the material to remove the contaminants and etching effects on the surface of the material, roughen the surface of the material, and increase the surface ratio and wettability.
(2) Chemical reaction:
Use surface activation to generate new active groups on the surface of the material, and use this group to produce chemical covalent bonding with subsequent active materials. The subsequent active materials contain specific groups that can meet the application to meet the surface requirements. The characteristics can be firmly combined with the purpose.
- Product parameter -
Technical specifications | VP80 | |
Electrode | Effective size | 400(W)*410(D)mm |
Electrode distribution | 6 layers horizontally distributed, the distance between the plates is 45mm | |
Vacuum chamber | Size | 450(W)*400(D)*450(H) |
Material | Aviation aluminum alloy | |
Host | Main body size | 800(W)×1600(H)×800(D)mm |
Installation area | 1500*1500mm | |
Weight | Standard model: 500KG | |
RF power supply | Power@frequency | US CERES-600W@13.56MHz or 1000W@40Khz |
Vacuum pump | Frequency converter | Germany Siemens inverter control vacuum pump motor |
Mechanical oil pump | Japan ULAVC-60m3/h | |
Main accessories | Barometer | SevenStar 2 channel 0-300sccm |
Vacuum detector | Japan ULAVC Pirani style | |
Vacuum breaking valve | Japan CKD pneumatic valve | |
The electromagnetic valve | Japan SMC vacuum solenoid valve | |
Way to control | Siemens PLC & Human Machine Interface | |
Installation conditions | Electricity | AC380,50/60Hz,3Phase 5wire,5.2KVA |
Compressed air | 0.4-0.6MPa | |
Process gas | O2 N2 H2 Ar | |
Exhaust pipe connection | KF40 |
- Use -
> Surface cleaning before wire bonding
> Plasma cleaning before IC bonding
> Activation and cleaning of ABS plastic
> Cleaning before electroplating ceramic package
> Surface modification and cleaning of other electronic materials
- Characteristic -
> Use 13.56MHz RF power supply with automatic network matcher or IF 40Khz power supply
> Product placement jigs are flexible and changeable, which can be adapted to products of different shapes
> The product placement platform is flexible and easy to operate
> Very small footprint
- Change of surface contact angle before and after plasma treatment -
- Dyne value changes before and after plasma treatment -
Guangdong Kimberlite Technology Co., Ltd. is a high-tech enterprise with automation equipment as the leading, R & D, production and manufacturing.
It also has Shenzhen kimberlite Technology Co., Ltd., which is a high-tech enterprise specializing in plasma etching and cleaning system. Using plasma system R & D technology from Germany for 25 years, we provide plasma processing system for customers in high-tech electronic fields such as mobile phones, computers, circuit boards, led, semiconductor, photoelectric, solar energy, automobile, medical and other high-tech electronic fields and large-scale industrial fields.
The core members of the company's team have educational background related to automation equipment and application. Some of them have served for related well-known enterprises, and have many years of experience in automation equipment research and technology application.
Adhering to the "customer first, quality first, technological innovation, win-win cooperation" business philosophy, the company constantly introduces high-quality, high-standard, low-cost products, to provide real-time pre-sale, after-sales and technical integration of professional services for all customers.